# Process window

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The **process window** is a graph with a range of parameters for a specific manufacturing process that yields a defined result. Typically multiple parameters are plotted in such a graph with a central region where the process behaves well, while the outer borders define regions where the process becomes unstable or returns an unfavourable result. A statistical evaluation of the process performance is further performed by the calculation of the associated [Process Window Index](/source/Process_Window_Index).[citation needed]

## Applications

Typical applications are found in [photolithography](/source/Photolithography)[1] where the response of a photoresist to parameters like temperature, radiation intensity, critical dimension and sidewall angle of the structures, etc. are plotted versus an optical parameter such as the [numerical aperture](/source/Numerical_aperture) to optimize the design of an exposure tool or to achieve a reproducible result and high yield.[citation needed]

## References

1. Mack, Chris. ["Swing curves and the process window"](http://www.lithoguru.com/scientist/litho_tutor/TUTOR20%20%28Winter%2098%29.pdf). *Tutorials on Photolithography*. Retrieved 1 October 2013.

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Adapted from the Wikipedia article [Process window](https://en.wikipedia.org/wiki/Process_window) by Wikipedia contributors ([contributor history](https://en.wikipedia.org/wiki/Process_window?action=history)). Available under [Creative Commons Attribution-ShareAlike 4.0 International](https://creativecommons.org/licenses/by-sa/4.0/). Changes may have been made.