# Microactuator

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{{Short description|Type of microscopic servomechanism}}
{{More citations needed|date=November 2025}}

A '''microactuator''' is a [microscopic](/source/microscopic) [servomechanism](/source/servomechanism) that supplies and transmits a measured amount of energy for the operation of another mechanism or system. As a general [actuator](/source/actuator), following standards have to be met:
* Large travel
* High precision
* Fast switching
* Low power consumption
* Power free force sustainability
For microactuator, there are two in addition
* Microstructurability
* [Integrability](/source/Integrable_system)

==Principle of microactuators==
The basic principle can be described as the expression for [mechanical work](/source/mechanical_work)<br />
<math>W=\overrightarrow{F}\cdot \Delta \overrightarrow{r}</math> <br />
since an actuator is to manipulate positions and therefore force is needed. For different kind of microactuators, different physical principles are applied.

==Classes of microactuators==
Sources:<ref>{{cite journal |last1=Fujita |first1=Hiroyuki |last2=Toshiyoshi |first2=Hiroshi |title=Micro actuators and their applications |journal=Microelectronics Journal |date=1998 |volume=29 |issue=9 |pages=637–640 |doi=10.1016/S0026-2692(98)00027-5}}</ref><ref>{{cite journal |last1=Wood |first1=D. |last2=Burdess |first2=J. S. |last3=Harris |first3=A. J. |title=Actuators and their mechanisms in microengineering |journal=IEE Colloquium on Actuator Technology: Current Practice and New Developments (Digest No: 1996/110) |date=1996 |pages=7/1–7/3 |doi=10.1049/ic:19960698}}</ref><ref>{{cite journal |last1=Ma |first1=Z. C. |last2=Fan |first2=J. |last3=Wang |first3=H. |last4=Chen |first4=W. |last5=Yang |first5=G. Z. |last6=Han |first6=B. |title=Microfluidic Approaches for Microactuators: From Fabrication, Actuation, to Functionalization |journal=Small |date=2023 |volume=19 |issue=22 |doi=10.1002/smll.202300469 |pmid=36855777}}</ref><ref>{{cite journal |last1=Yoshida |first1=K. |last2=Park |first2=J. H. |last3=Yano |first3=H. |last4=Yokota |first4=S. |last5=Yun |first5=S. |title=Study of Valve-Integrated Microactuator Using Homogeneous Electro-Rheological Fluid |journal=Sensors and Materials |date=2005 |volume=17 |issue=3 |pages=97-112 |url=https://sensors.myu-group.co.jp/sm_pdf/SM590.pdf}}</ref>
*[Electrostatic](/source/Electrostatic)
*[Electromagnetic](/source/Electromagnetism)
*[Piezoelectric](/source/Piezoelectric)
*[Fluid](/source/Fluid)
*[Thermal](/source/Heat)

==See also==
*[Newton's laws](/source/Newton's_laws)
*[Euler–Bernoulli beam equation](/source/Euler%E2%80%93Bernoulli_beam_theory)
*[Electrostatics](/source/Electrostatics)
*[Electromagnetism](/source/Electromagnetism)
*[Piezoelectricity](/source/Piezoelectricity)
*[Microfluidics](/source/Microfluidics)
*[Sensors](/source/Sensors)
*[Nanotube nanomotor](/source/Nanotube_nanomotor)

== References ==
{{Reflist}}

{{Authority control}}

Category:Microtechnology
Category:Actuators

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Adapted from the Wikipedia article [Microactuator](https://en.wikipedia.org/wiki/Microactuator) by Wikipedia contributors ([contributor history](https://en.wikipedia.org/wiki/Microactuator?action=history)). Available under [Creative Commons Attribution-ShareAlike 4.0 International](https://creativecommons.org/licenses/by-sa/4.0/). Changes may have been made.